Publikationen

Publikationen
Zeitschriftenartikel

2017



  • M. to Baben, M. Hans, D. Primetzhofer, S. Evertz, H. Ruess, J. M. Schneider, Unprecedented thermal stability of inherently metastable (Ti,Al)N by point defect engineering, Material Research Letters 5, 158-169 (2017)
  • C. Corbella, A. Marcak, T. de los Arcos, and A. von Keudell, Electric potential screening on metal targets submitted to reactive sputtering, Journal of Vacuum Science and Technology A 35 (2017) 021307
  • M. Daksha, A. Derzsi, S. Wilczek, J. Trieschmann, T. Mussenbrock, P. Awakowicz, Z. Donkó, J. Schulze, The effect of realistic heavy particle induced secondary electron emission coefficients on the electron power absorption dynamics in single- and dual-frequency capacitively coupled plasmas. Plasma Sources Science and Technology 26, 85006 (2017)
  • G. Greczynski, S. Mráz, M. Hans, D. Primetzhofer, J. Lu, L. Hultman, J. M. Schneider,Unprecedented Al supersaturation in single-phase rock salt structure VAlN films by Al+subplantation, Journal of Applied Physics 121, 171907 (2017) 
  • A. Hecimovic, C. Corbella, C. Maszl, W. Breilmann, and A. von Keudell, Investigation of plasma spokes in reactive high power impulse magnetron sputtering discharge, Journal of Applied Physics 121 (2017) 171915 
  • D. Holec, L. Zhou, H. Riedl, C. M. Koller, P. H. Mayrhofer, M. Friák, M. Šob, F. Körmann, J. Neugebauer, D. Music, M. A. Hartmann, F. D. Fischer, Atomistic modeling-based design ofnovel materials, Advanced Engineering Materials 19, 1600688 (2017) 
  • O. Hunold, P. Keuter, P. Bliem, D. Music., F. Wittmers, A. L. Ravensburg, D. Primetzhofer, J.M. Schneider, Elastic properties of amorphous T0.75Y0.75B14 (T = Sc, Ti, V, Y, Zr, Nb) and the effect of O incorporation on bonding, density and elasticity (T´ = Ti, Zr), Journal of Physics: Condensed Matter 29, 085404 (2017) 
  • A. von Keudell and C. Corbella, Review Article: Unraveling synergistic effects in plasma-surface processes by means of beam experiments, Journal of Vacuum Science and Technology A 35 (2017) 050801 
  • V. Layes, S. Monje, C. Corbella, V. Schulz-von der Gathen, A. von Keudell, and T. de los Arcos, Composite targets in HiPIMS plasmas: correlation of in-vacuum XPS characterization and optical plasma diagnostics, Journal of Applied Physics 121 (2017) 171912
  • V. Layes, S. Monje, C. Corbella, J. Trieschmann, T. de los Arcos, and A. von Keudell, Species transport on the target during high power impulse magnetron sputtering, Applied Physics Letters 110 (2017) 081603 
  • D. Music, L. Banko, H. Ruess, M. Engels, A. Hecimovic, D. Grochla, D. Rogalla, T. Brögelmann, A. Ludwig, A. von Keudell, K. Bobzin, J. M. Schneider, Correlative plasma-surface model for metastable Cr-Al-N: Frenkel pair formation and influence of the stress state on the elastic properties, Journal of Applied Physics 121, 215108 (2017)
  • J. Trieschmann, T. Mussenbrock, Kinetic analysis of negative power deposition in inductive low pressure plasmas, Plasma Sources Science and Technology 26, 24004 (2017)
  • J. Trieschmann, F. Schmidt, T. Mussenbrock, Particle‐in‐Cell/Test‐Particle Simulations of Technological Plasmas: Sputtering Transport in Capacitive Radio Frequency Discharges, Plasma Processes and Polymers 14, 1600140 (2017)
2016


  • K. Bobzin, T. Brögelmann, N.C. Kruppe, M. Arghavani, Verformungsverhalten nanostrukturierter HPPMS-Hartstoffschichten, Vakuum in Forschung und Praxis, Vol. 28, Nr. 3, 18-25 (2016)
  • C. Corbella, A. Marcak, T. de los Arcos, and A. von Keudell, Revising seconary electron yields of ion-sputtered metal oxides, Journal of Physics D: Applied Physics 49 (2016) 16LT01
  • D. Eremin, S. Bienholz, D. Szeremley, J. Trieschmann, S. Ries, P. Awakowicz, T. Mussenbrock, und R. P. Brinkmann, On the Physics of a Large CCP Discharge, Plasma Sources Science and Technology 25, 2, 025020, doi:10.1088/0963-0252/25/2/025020 (2016)
  • M. Gebhard, F. Mitschker, M. Wiesing, I. Giner, B. Torun, T. de los Arcos, P. Awakowicz, G. Grundmeier and A. Devi, An efficient PE-ALD process for TiO2 thin films employing a new Ti-precursor, Journal of Materials Chemistry C 4, 1057 (2016)
  • G. Greczynski, S. Mráz, L. Hultman, J. M. Schneider, Unintentional carbide formation evidenced during high-vacuum magnetron sputtering of transition metal nitride thin films, Applied Surface Science 385, 356-359 (2016)
  • G. Greczynski, S. Mráz, L. Hultman, J. M. Schneider, Venting temperature determines surface chemistry of magnetron sputtered TiN films, Applied Physics Letters 108, 041603 (2016)
  • M. Hans, M. to Baben, Y.-T. Chen, K. G. Pradeep, D. M. Holzapfel, D. Primetzhofer, D. Kurapov, J. Ramm, M. Arndt, H. Rudigier, J. M. Schneider, Substrate rotation-induced chemical modulation in Ti-Al-O-N coatings synthesized by cathodic arc in an industrial deposition plant, Surface and Coatings Technology 305, 249-253 (2016)
  • Hecimovic, Anomalous cross-B field transport and spokes in HiPIMS plasma, Journal of Physics D: Applied Physics 49, 18LT01 (2016)
  • Hecimovic, C. Maszl, V. Schulz-von der Gathen, M. Böke, and A. von Keudell, Spokes rotation reversal in magnetron discharges of aluminium, chromium and titanium, Plasma Sources Science Technology 25, 035001, doi:10.1088/0963-0252/25/3/035001 (2016)
  • O. Hunold, Y.-T. Chen, D. Music, P. O. Å. Persson, D. Primetzhofer, M. to Baben, J.-O. Achenbach, P. Keuter, J. M. Schneider, Correlative theoretical and experimental investigation of the formation of AlYB14 and competing phases, Journal of Applied Physics 119, 085307 (2016)
  • O. Hunold, M. Wiesing, T. de los Arcos, D. Music, G. Grundmeier, J. M. Schneider, Influence of Oexposure on the interaction between CH4 and amorphous AIYB14, Applied Surface Science 392, 1165-1172 (2016)
  • O. Hunold, D. Music, J. M. Schneider, Theoretical study of phase stability and elastic properties of T 0.75 Y 0.75 B14 (T = Sc, Ti, V, Y, Zr, Nb, Si), Journal of Physics: Condensed Matter 28, 105501 (2016)
  • Kanitz, A. Hecimovic, M. Böke, and J. Winter, Two dimensional spatial Argon metastable dynamics in a HiPIMS discharges, Journal of Physics D: Applied Physics 49, 125203, doi:10.1088/0022-3727/49/12/125203 (2016)
  • von Keudell, A. Hecimovic, C. Maszl, “Gepulste Hochleistungs-Magnetron-Plasmen (HPPMS) Kontrolle durch Überwachung der Strom-Spannungskennlinien“, Vakuum in Forschung und Praxis 28, 24 (2016)
  • D. Kirchheim, M. Jaritz, R. Dahlmann, Ch. Hopmann, Wirkmechanismen bei der Barriereausrüstung von Kunststoffen mit Hilfe von PECVD, Vakuum in Forschung und Praxis 28, 1, 36–41, DOI: 10.1002/vipr.201600603 (2016)
  • D. Music, R. W. Geyer, J. M. Schneider, Recent progress and new directions in density functional theory based design of hard coatings, Surface and Coatings Technology 286, 178-190 (2016)
  • M. Wiesing, M. to Baben, J. M. Schneider, T. de los Arcos, G. Grundmeier, “Combined Electrochemical and Electron Spectroscopic Investigations on the Surface Oxidation of TiAlN HPPMS Hard Coatings, Paper accepted (minor revisions) in Electrochimica Acta
  • S. Wilczek, J. Trieschmann, D. Eremin, R. P. Brinkmann, J. Schulze, E. Schuengel, A. Derzsi, I. Korolov, P. Hartmann, Z. Donkó, T. Mussenbrock, Kinetic interpretation of resonance phenomena in low pressure capacitively coupled radio frequency plasmas. Physics of Plasmas 23, 63514 (2016)

2015

  • H. Bahre, H. Behm, D. Grochla, M. Böke, R. Dahlmann, C. Hopmann, A. Ludwig, J. Winter, Film Stress of Amorphous Hydrogenated Carbon on Biaxially Oriented Polyethylene Terephthalate, Plasma Processes und Polymers (2015), DOI: 10.1002/ppap.201500045K.
  • K. Bobzin, T. Brögelmann, R. H. Brugnara, Aluminum-rich HPPMS (Cr1-xAlx)N Coatings Deposited with Different Target Compositions and at Various Pulse Lengths, Vacuum (2015)
  • K. Bobzin, T. Brögelmann, R. H. Brugnara, S. Chromy, Analysis of Ion Energy Distribution at the Substrate during a HPPMS (Cr,Al)N Process using Retarding Field Energy Analyzer and Energy Resolved Mass Spectrometer, Thin Solid Films (2015)
  • K. Bobzin, T. Brögelmann, R. H. Brugnara, N. Kruppe, S. Chromy, Influence of HPPMS Pulse Parameters on the Reactive gas N2 and on the Properties of (Cr,Al)N Coatings, Surface and Coatings Technology (2015)
  • K. Bobzin, T. Brögelmann, R. H. Brugnara, M. Arghavani, T-S. Yang, Y-Y. Chang, S-Y. Chang, Investigation on Plastic Behavior of HPPMS CrN, AlN and CrN/AlN-Multilayer Coatings using Finite Element Simulation and Nanoindentation, Surface and Coatings Technology 284, 310-317 (2015)
  • K. Bobzin K, T. Brögelmann, R. H. Brugnara, M. Arghavani, T-S. Yang, Y-Y. Chang, S-Y. Chang, Investigation on Plastic Behavior of HPPMS CrN, AlN and CrN/AlN-Multilayer Coatings using Finite Element Simulation and Nanoindentation, Surface and Coatings Technology (2015)
  • W. Breilmann, A. Eitrich, C. Maszl, A. Hecimovic, V. Layes, J. Benedikt, A. von Keudell, High power impulse sputtering of chromium: correlation between the energy distribution of chromium ions and spoke formation, Journal of Physics D: Applied Physics 48, 295202 (2015)
  • Bulusu, S. Graham, H. Bahre, H. Behm, M. Böke, R. Dahlmann, Ch. Hopmann, J. Winter, The mechanical behavior of ALD-polymer hybrid films under tensile strain, Advanced Engineering Materials 17, 7, DOI: 10.1002/adem.201400431 (2015)
  • Corbella, S. Große-Kreul, A. von Keudell, Exploring the Structure of the Modified Top Layer of Polypropylene During Plasma Treatment, Plasma Processes and Polymers 12, 564 (2015)
  • S. Gallian, J. Trieschmann, T. Mussenbrock, R. P. Brinkmann, W. N. G. Hitchon, Analytic model of the energy distribution function for highly energetic electrons in magnetron plasmas, Journal of Applied Physics 117, 023305 (2015)
  • G. Grundmeier, A. von Keudell and T. de los Arcos, Fundamentals and Applications of Reflection FTIR Spectroscopy for the Analysis of Plasma Processes at Materials Interfaces, Plasma Processes and Polymers (early view), DOI: 10.1002/ppap.201500087 (2015)
  • Hecimovic, V. Schulz-von der Gathen, M. Böke, A. von Keudell, J. Winter, Spoke transitions in HiPIMS discharges, Plasma Sources Science and Technology 24, 45005 (2015)
  • F. Mitschker, J. Dietrich, B. Ozkaya, T. de los Arcos, I. Giner, P. Awakowicz, G. Grundmeier, Spectroscopic and Microscopic Investigations of Degradation Processes in Polymer Surface-Near Regions During the Deposition of SiOx Films, Plasma Processes and Polymers 12, DOI: 10.1002/ppap.201500085 (2015)
  • A. Marcak, C. Corbella, T. de los Arcos, and A. von Keudell, Note: Ion-induced secondary electron emission from oxidized metal surfaces measured in a particle beam reactor,  Review of Scientific Instruments 86 (2015) 106102
  • S. Monje, C. Corbella, and A. von Keudell, Elementary surface processes during reactive magnetron sputtering of chromium,  Journal of Applied Physics  118 (2015) 133301
  • D. Music, R. W. Geyer, J. M. Schneider, Recent progress and new directions in density functional theory based design of hard coatings, Surface and Coatings Technology 286, 178–190, DOI: 10.1016/j.surfcoat.2015.12.021 (2016)
  • B. Ozkaya, F. Mitschker, O. Ozcan, P. Awakowicz, G. Grundmeier, Inhibition of interfacial oxidative degradation during SiOx plasma polymer barrier film deposition on model organic substrates, Plasma Processes and Polymers 12 (4), (2015) 392-397
  • S. Rezaei, S. Wulfinghoff, S. Reese, Prediction of the fracture behavior in nano-laminated structures using a cohesive zone element technique, Proceedings of the 3rd ECCOMAS Young Investigators Conference on Computational Methods in Applied Sciences and 6th GACM Colloquium on Computational Mechanics, submitted (May 15, 2015)
  • S. Rezaei, S. Wulfinghoff, R. Kebriaei, S. Reese, Application of a cohesive zone element for the prediction of damage in nano/micro coating, Proceedings in Applied Mathematics and Mechanics, Wiley, submitted (May 28, 2015)
  • J. Trieschmann, T. Mussenbrock, Transport of Sputtered Particles in Capacitive Sputter Sources, Journal of Applied Physics 118, 033302 (2015)
  • S. Wilczek, J. Trieschmann, J. Schulze, E. Schuengel, R. P. Brinkmann, A. Derzsi, I. Korolov, Z. Donkó, T. Mussenbrock, The effect of the driving frequency on the confinement of beam electrons and plasma density in low-pressure capacitive discharges. Plasma Sources Science and Technology 24, 24002 (2015)
  • S. Wulfinghoff, S. Reese, M. Fassin, Y. Kiliclar, T. Brepols, S. Rezaei, Properties and Restrictions related to Anisotropic Damage Theories based on 2nd Order Damage Tensors, Proceedings of the 3rd ECCOMAS Young Investigators Conference on Computational Methods in Applied Sciences and 6th GACM Colloquium on Computational Mechanics, submitted (May 3, 2015)

2014

  • N. Bagcivan, K. Bobzin, A. Ludwig, D. Grochla, R. H. Brugnara: CrN/AlN Nanolaminate Coatings Deposited via High Power Pulsed and Middle Frequency Pulsed Magnetron Sputtering, Thin Solid Films 572, 153-160 (2014).
  • N. Bagcivan, K. Bobzin, T. Brögelmann, C. Kalscheuer: Development of (Cr,Al)ON coatings using middle frequency magnetron sputtering and investigations on tribological behavior against polymers, Surface and Coatings Technology, 260, 347-361 (2014)
  • N. Bagcivan, K. Bobzin, R. H. Brugnara, Nitride and Oxy-Nitride PVD Coatings for Application in Plastics Processing, Proceedings of 11th THE-A-Coatings Conference, Thessaloniki, 79-86 (2014)
  • H. Behm, K. Bahroun, H. Bahre, D. Kirchheim, F. Mitschker, N. Bibinov, M. Böke, R. Dahlmann, P. Awakowicz, Ch. Hopmann, J. Winter, Adhesion of thin CVD Films on pulsed plasma pre-treated polypropylene, Plasma Processes and Polymers 11, 5, 418-425 (2014)
  • S. Bienholz, T Styrnoll, P. Awakowicz, On the electrical asymmetry effect in large area multiple frequency capacitively coupled plasmas, Journal of Physics D: Applied Physics 47, 065201 (2014)
  • K. Bobzin, N. Bagcivan, S. Theiß, J. Trieschmann, R. H. Brugnara, S. Preissing, A. Hecimovic, Influence of Ar/Kr ratio and pulse parameters in a Cr-N HPPMS process on plasma and coating properties, Journal of Vacuum Science and Technology A 32, 021513 (2014)
  • K. Bobzin, N. Bagcivan, T. Brögelmann, R.H. Brugnara, HPPMS-Beschichtungen metallischer Komponenten für die Kunststoffverarbeitung, GAK Fachmagazin für die Polymerindustrie 10, 616-621 (2014)
  • T. de los Arcos et al., Description of HiPIMS plasma regimes in terms of composition, spoke formation and deposition rate, Plasma Sources Science Technology 23, 054008 (2014)
  • M. Hans, M. to Baben, D. Music, J. Ebenhöch, D. Primetzhofer, D. Kurapov, M. Arndt, H. Rudigier, J. M. Schneider, Effect of oxygen incorporation on the structure and elasticity of Ti-Al-O-N coatings synthesized by cathodic arc and high power pulsed magnetron sputtering, Journal of Applied Physics 116, 093515 (2014)
  • A. Hecimovic, M. Böke, J. Winter, The characteristic shape of emission profiles of plasma spokes in HiPIMS: the role of secondary electrons, Journal of Physics D: Applied Physics 47, 102003 (2014)
  • D. Kirchheim, R. Dahlmann, Ch. Hopmann, K. Bahroun, H. Behm, Elongation properties of multilayer PECVD barrier coatings on PET films, Journal of Plastics Technology 10, 4, 142-159 (2014)
  • C. Kunze, D. Music, M. to Baben, J.M. Schneider, G. Grundmeier, Temporal evolution of oxygen chemisorption on TiAlN, Applied Surface Science 290, 504 (2014)
  • B. Ozkaya, H. Bahre, M. Böke, D. Höwer, S. Reese, J. Winter, G. Grundmeier, Electrochemical analysis of strain-induced crack formation of bilayer barrier plasma polymer films on metal and polymer substrates, Surface and Coatings Technology 244, 173-179 (2014)
  • S. Siepa, S. Danko, T. V Tsankov, T. Mussenbrock, U. Czarnetzki, On the OES line-ratio technique in argon and argon-containing plasmas, Journal of Physics D: Applied Physics 47, 445201 (2014)
  • S. Schröter, H. Bahre, M. Böke, J. Winter, The Role of Argon Metastables in an Inductively Coupled Plasma for Treatment of PET, Plasma Processes and Polymers 11, 239-246 (2014)


2013


  • T. de los Arcos, V. Layes, Y. Aranda Gonzalvo, V. Schulz-von der Gathen, A. Hecimovic, J. Winter, Current-voltage characteristics and fast imaging of HPPMS plasmas: transition from self-organized to homogeneous plasma regimes, Journal of Physics. D: Applied Physics 46, 335201 (2013)
  • P. Awakowicz and U. Czarnetzki, Pulsed high-power plasmas for deposition of nanostructured thin films, Journal of Physics D: Applied Physics 46, 080301 (2013)
  • M. to Baben, L. Raumann, J.M. Schneider, Phase stability and elastic properties of titanium aluminum oxynitride studied by ab initio calculations, Journal of Physics D: Applied Physics 46, 084002 (2013)
  • N. Bagcivan, K. Bobzin, G. Grundmeier, C. Kunze, R. H. Brugnara, Influence of HPPMS Pulse Length and Inert Gas mixture on the Properties of (Cr,Al)N Coatings, Thin Solid Films 549, 192-198 (2013)
  • N. Bagcivan, K. Bobzin, R. H. Brugnara, Investigation of the Properties of Low Temperature (Cr1-xAlx)N Coatings Deposited via Hybrid PVD DC-MSIP/HPPMS, Materials Science and Engineering Technology 44 (8), 667-672 (2013)
  • N. Bagcivan, K. Bobzin, S. Theiß, Synthesis of nano-structured HPPMS CrN/AlN coatings, Journal of Physics D: Applied Physics 46, 084001 (2013)
  • H. Bahre, K. Bahroun, H. Behm, S. Steves, P. Awakowicz, M. Böke, Ch. Hopmann, J. Winter, Surface pre-treatment for barrier coatings on polyethylene terephthalate, Journal of Physics D: Applied Physics 46, 084012 (2013)
  • S. Bienholz, N. Bibinov, P. Awakowicz, Multiple frequency capacitively coupled plasmas as a new technology for sputter processes, Journal of Physics D: Applied Physics 46, 084010 (2013)
  • K. Bobzin, N. Bagcivan, S. Theiß, R. H. Brugnara, J. Perne, Approach to determine stress strain curves  by FEM supported nanoindentation, Materials Science and Engineering Technology, 44, No. 6, 571–576 (2013) 
  • K. Bobzin, N. Bagcivan, R.H. Brugnara, M. Schäfer, R.P. Brinkmann, T. Mussenbrock, J. Trieschmann, Continuum and Kinetic Simulations of the Neutral Gas Flow in an Industrial Physical Vapor Deposition Reactor, Surface and Coatings Technology 237, 176-181 (2013)
  • K. Bobzin, N. Bagcivan, S. Theiß, J. Perne, Flow curve determination on dc-MS and HPPMS CrAlN coatings, Journal of Physics D: Applied Physics 46, 084006 (2013)
  • K. Bobzin, N. Bagcivan, S. Theiß, R. H. Brugnara, J. Perne, Flow Curve Determination of Thin Films by   Improved Finite Element Models and Different Nanoindenter Geometries, Thin Solid Films 549, 313-320 (2013)
  • C. Corbella, S. Grosse-Kreul, O. Kreiter, T. de los Arcos, J. Benedikt, A. von Keudell, Particle beam experiments for the analysis of reactive sputtering processes in metals and polymer surfaces, Review of Scientific Instruments 84, 103303 (2013)
  • S. Gallian, W.N.G. Hitchon, D. Eremin, T. Mussenbrock, R.P. Brinkmann, A phenomenological model for the description of rotating spokes in HiPIMS discharges, Plasma Sources Science and Technology 22, 055012 (2013)
  • C. Gnoth, C. Kunze, M. Hans, M. to Baben, J. Emmerlich, J.M. Schneider, G. Grundmeier, Surface chemistry of TiAlN and TiAlNO coatings deposited by means of high power pulsed magnetron sputtering, Journal of Physics D: Applied Physics 46, 084003 (2013)
  • J. Emmerlich, N. Thieme, M. to Baben, D. Music, and J.M. Schneider, Stability, elastic properties and fracture toughness of Al0.75X0.75B14 (X D Sc, Ti, V, Cr, Y, Zr, Nb, Mo) investigated using ab initio calculations Journal of Physics: Condensed Matter 25, 335501 (2013)
  • D. Eremin, T. Hemke, R. P. Brinkman, T. Mussenbrock, Simulations of electromagnetic effects in high-frequency capacitively coupled discharges using the Darwin approximation, Journal of Physics D: Applied Physics 46, 084017 (2013)
  • C. Kunze, R.H. Brugnara, N. Bagcivan, K. Bobzin, G. Grundmeier, Surface chemistry of PVD (Cr,Al)N coatings deposited by means of direct current and high power pulsed magnetron sputtering, Surface and Interface Analysis 45, 1884-1892 (2013)
  • C.-N. Liu, B. Ozkaya, S. Steves, P. Awakowicz, G. Grundmeier, Combined in situ FTIR-spectroscopic and electrochemical analysis of nanopores in ultra-thin SiOx-like plasma polymer barrier films, Journal of Physics D: Applied Physics 46, 084015 (2013)
  • D. Music, F. Henslinga, T. Pazur, J. Bednarcik, M. Hans, V. Schnabel, C. Hostert, J.M. Schneider, Bonding and elastic properties of amorphous AlYB14, Solid State Communications 169, 6 (2013)
  • D. Music, J.M. Schneider, Ab initio study of Ti0.5Al0.5N(001)—residual and environmental gas interactions, New Journal of Physics 15, 073004 (2013)
  • M. Prenzel, A. Kortmann, A. von Keudell, F. Nahif, J.M. Schneider, M. Shihab, R.P. Brinkmann, Formation of crystalline γ-Al2O3 induced by variable substrate biasing during reactive magnetron sputtering, Journal of Physics D: Applied Physics 46, 084004 (2013)
  • S.J. Rotert, D. Music, M. to Baben, J.M. Schneider, Theoretical study of elastic properties and phase stability of M0.5Al0.5N1-xOx (M=Sc, Ti, V, Cr), Journal of Applied Physics 113, 083512 (2013)
  • T. Schlebrowski, H. Bahre, M. Böke, and J. Winter, Monitoring particle growth in deposition plasmas, Plasma Sources Science and Technology 22, 065014 (2013)
  • K.P. Shaha, H. Rueß, S. Rotert, M. to Baben, D. Music, J.M. Schneider, Nonmetal sublattice population induced defect structure in transition metal aluminum oxynitrides, Applied Physics Letters 103, 221905 (2013)
  • S. Steves, T. Styrnoll, F. Mitschker, S. Bienholz, N. Bibinov, P. Awakowicz, Characterization of low-pressure microwave and radio frequency discharges in oxygen applying optical emission spectroscopy and multipole resonance probe, Journal of Physics D: Applied Physics 46, 445201 (2013)
  • S. Steves, B. Ozkaya, C.-N. Liu, O. Ozcan, N. Bibinov, G. Grundmeier, P. Awakowicz, Silicon oxide barrier films deposited on PET foils in pulsed plasmas: influence of substrate bias on deposition process and film properties, Journal of Physics D: Applied Physics 46, 084013 (2013)
  • J. Trieschmann, M. Shihab, D. Szeremley, A. E. Elgendy, S. Gallian, D. Eremin, R. P. Brinkman, T. Mussenbrock, Ion energy distribution functions behind the sheaths of magnetized and non-magnetized radio frequency discharges, Journal of Physics D: Applied Physics 46, 084016 (2013)
  • M.M. Turner, A. Derzsi, Z. Donko, D. Eremin, S.J. Kelly, T. Lafleur, T. Mussenbrock, Simulation Benchmarks for Low Pressure Plasmas: Capacitive Discharge, Physics of Plasmas 20, 013507 (2013)
  • A. Will, T. de los Arcos, C. Corbella, A. Hecimovic, P. D Machura, J. Winter, A. von Keudell, Target implantation and redeposition processes during high-power impulse magnetron sputtering of aluminum, Journal of Physics D: Applied Physics 46, 084009 (2013)
  • J. Winter, A. Hecimovic, T. de los Arcos, M. Böke,V. Schulz-von der Gathen, Instabilities in high-power impulse magnetron plasmas: from stochasticity to periodicity, Journal of Physics D: Applied Physics 46, 084007 (2013)


2012


  •  M. to Baben, L.Raumann, D. Music, J.M. Schneider, Origin of the nitrogen over- and understoichiometry in Ti0:5Al0:5N thin films, Journal of Physics: Condensed Matter 24, 155401 (2012)
  • N. Bagcivan, K. Bobzin, S. Theiß, Comparison of (Cr0.75Al0.25)N Coatings Deposited by Conventional and High Power Pulsed Magnetron Sputtering, Contributions to Plasma Physics, 52, 7, 599 (2012)
  • S. Bienholz, E. Semmler, P. Awakowicz, H. Brunken, A. Ludwig, Dual frequency capacitive plasmas in Fe and Ni sputter applications: correlation of discharge properties on thin film properties, Plasma Sources Science and Technology 21, 015010 (2012)
  • K. Bobzin, N. Bagcivan, S. Theiß, (Cr1-xAlx)N: A Comparison of Direct Current, Middle Frequency Pulsed and High Power Pulsed Magnetron Sputtering for Injection Molding Components, accepted for publication in Thin Soid Films
  • A.P. Ehiasarian, A. Hecimovic, T. de los Arcos, R. New, V. Schulz-von der Gathen, M Böke, J. Winter, High Power Impulse Magnetron sputtering discharges: Instabilities and plasma self-organisation. Applied Physics Letters 100, 114101 (2012)
  • A. Hecimovic, T. de los Arcos, V. Schulz-von der Gathen, M. Böke, J. Winter, Temporal evolution of the radial plasma emissivity profile in HIPIMS plasma discharge, Plasma Sources Science and Technology 21, 035017 (2012)
  • D. Music, D. Lange, L. Raumann, M. to Baben, F. von Fragstein, J.M. Schneider, Polypropylene–MAlN (M=Ti, Cr) interface interactions, Surface Science 606, 986 (2012)
  • T. Mussenbrock, Modeling and simulation of ion energy distribution functions in technological plasmas, Contributions to Plasma Physics 52, 571 (2012)
  • Marina Prenzel, Teresa de los Arcos, Annika Kortmann, Jörg Winter, Achim von Keudell, Embedded argon as a tool for sampling local structure in thin plasma deposited aluminum oxide films, Journal of Applied Physics 112, 103306 (2012)
  • E. Schüngel, D. Eremin, J. Schulze, T. Mussenbrock, U. Czarnetzki, The Electrical Asymmetry Effect in Geometrically Asymmetric CCRF Discharges, Journal of Applied Physics 112, 053302 (2012)
  • M. Shihab, D. Ziegler, R.P. Brinkmann, Fast kinetically self-constistent simulation of RF modulated plasma boundary sheaths, Journal of Physics D: Applied Physics 45, 185202 (2012)


2011


  • M. Lapke, J. Oberrath, C. Schulz, R. Storch, T. Styrnoll, P. Awakowicz, R.P. Brinkmann, T. Mussenbrock, T. Musch, I. Rolfes, and C. Zietz: The Multipole Resonance Probe: Characterization of a Prototype, Plasma Sources Science and Technology, (2011) 042001
  • P. Mertmann, D. Eremin, T. Mussenbrock, R.P. Brinkmann, P. Awakowicz, Fine-sorting one-dimensional particle-in-cell algorithm with Monte-Carlo collisions on a graphics processing unit, Computer Physics Communications 182, 2161 (2011)
  • W. Michaeli, Ch. Hopmann, F.von Fragstein, K. Bahroun, H. Behm, Investigations on the influence of hygroscopic surfaces on the plasma-assisted modification of polyamide, Surface and Coatings Technology 205, 506 (2011)
  • Rastgoo Lahrood, T. de los Arcos, M. Prenzel, A. von Keudell, J. Winter, X-ray photoelectron spectroscopy on implanted argon as a tool to follow local structural changes in thin films, Thin Solid Films 520, 1625 (2011)
  • T. Reeswinkel, D. G. Sangiovanni, V. Chirita, L. Hultman, J.M. Schneider, Structure and mechanical properties of TiAlN–WNx thin films, Surface and Coatings Technology 205, 4821 (2011)
  • J. Schulze, E. Schüngel, U. Czarnetzki, M. Gebhardt, R.P. Brinkmann, T. Mussenbrock, Making a geometrically asymmetric capacitive rf discharge electrically symmetric, Applied Physics Letters 98, 031501 (2011)

2010

  • S. Theiss, N. Bibinov, N. Bagcivan, M. Ewering, P. Awakowicz, K. Bobzin, Time resolved optical emission spectroscopy of an HPPMS coating process, Journal of Physics D: Applied Physics 43, 075205 (2010)



Ausgewählte eingeladene Vorträge



2015


  • P. Awakowicz, Quantitative Characterisation of PVD Plasma Processes, ICMCTF 2015 - International Conference On Metallurgical Coatings & Thin Films, 20.–24. April 2015, San Diego, USA
  • M. to Baben, K.P. Shaha, M. Hans, P.K. Gokuldoss, Y.-T. Chen, D. Music, J. M. Schneider, Phase stability of transition metal aluminum oxynitride coatings, ICMCTF 2015 - International Conference On Metallurgical Coatings & Thin Films, 20.–24. April 2015, San Diego, USA
  • K. Bobzin, T. Brögelmann, R. H. Brugnara, M. Arghavani, T-S. Yang, Y-Y. Chang, S-Y. Chang, Investigation on Plastic Behavior of HPPMS CrN, AlN and CrN/AlN-Multilayer Coatings using Finite Element Simulation and Nanoindentation, ICMCTF 2015 - International Conference On Metallurgical Coatings & Thin Films, 20.–24. April 2015, San Diego, USA
  • K. Bobzin, T. Brögelmann, R. H. Brugnara, S. Chromy, Analysis of Ion Energy Distribution at the Substrate during a HPPMS (Cr,Al)N Process using Retarding Field Energy Analyzer and Energy Resolved Mass Spectrometer, ICMCTF 2015 - International Conference On Metallurgical Coatings & Thin Films, 20.–24. April 2015, San Diego, USA
  • K. Bobzin, T. Brögelmann, R. H. Brugnara, N. C. Kruppe, S. Chromy, Influence of HPPMS Pulse Parameters on the Reactive gas N2 and on the Properties of (Cr,Al)N Coatings, 6th International Conference on Fundamentals and Industrial Applications of HIPIMS, 08.-11. Juni 2015, Braunschweig
  • K. Bobzin, T. Brögelmann, R. H. Brugnara, M. Arghavani, Vergleich zwischen innovativen Nanoscratchanalysen und industriell etablierten Methoden zur Bestimmung der Verbundhaftfestigkeit von dünnen Hartstoffbeschichtungen auf technischen Oberflächen, Workshop „Messung der Schichthaftung“ der Europäischen Forschungsgesellschaft Dünne Schichten e.V. (EFDS), 24. Juni 2015, Dresden
  • M. Brochhagen, H. Bahre, H. Behm, D. Grochla, M. Böke, R. Dahlmann, C. Hopmann, A. Ludwig, J. Winter, Film stress of amorphous hydrogenated carbon on biaxially oriented polyethylene terephthalateI, SPC 22 - 22nd International Symposium on Plasma Chemistry, Juni 2015, University of Antwerp, Stadscampus, Antwerpen, Belgien
  • C. Corbella, Retarding Field Analyser, Arbeitskreis „Plasma diagnostic for thin film deposition and surface treatment“, 15. Juni 2015, Bochum
  • C. Corbella, S. Große-Kreul, A. von Keudell, Exploring the Structure of the Modified Top Layer of Polypropylene During Plasma Treatment, DPG-Frühjahrstagung, 2.-5. März 2015, Bochum
  • C. Corbella, O. Kreiter, S. Monje, S. Große-Kreul, A. von Keudell, Heterogeneous surface processes during reactive magnetron sputtering of metals, CIP 2015 - 20th International Colloquium on Plasma Processes, 1.-5. Juni 2015, Saint-Etienne, Frankreich
  • C. Corbella, S. Große-Kreul, A. von Keudell, Structural Modification of Polypropylene top layers exposed to reactive plasmas, poster presentation, CIP 2015 - 20th International Colloquium on Plasma Processes, 1.-5. Juni 2015, Saint-Etienne, Frankreich
  • M. Hans, Effect of Oxygen Incorporation on the Structure and Elasticity of Ti-Al-O-N Coatings Synthesized by Cathodic Arc and High Power Pulsed Magnetron Sputtering, ICMCTF 2015 - International Conference On Metallurgical Coatings & Thin Films, 20.–24. April 2015, San Diego, USA
  • A. Hecimovic, Correlation between Plasma Oscillations in DC and HiPIMS discharges, DPG-Frühjahrstagung, 2.-5. März 2015, Bochum
  • A. Hecimovic, Plasma oscillations and ion transport in DC and HiPIMS discharges, ICMCTF 2015 - International Conference On Metallurgical Coatings & Thin Films, 20.–24. April 2015, San Diego, USA
  • A. Hecimovic, Plasma oscillations in DC and HiPIMS discharges, 6th International Conference on HiPIMS 2015, 08.-11. Juni 2015, Braunschweig
  • A. Marcak, C. Corbella, T. de los Arcos, A. von Keudell, Secondary electron emission from oxidized metal surfaces measured in particle beam experiments, CIP 2015 - 20th International Colloquium on Plasma Processes, 1.-5. Juni 2015, Saint-Etienne, Frankreich
  • P. Preissing, Comparison of plasma emission profiles during glow discharge and arc, poster presentation, DPG-Frühjahrstagung, 2.-5. März 2015, Bochum
  • S. Rezaei, S. Wulfinghoff, R. Kebriaei, S. Reese, Modeling of the fracture behavior in laminated structures based on a cohesive zone element technique, 9th European Solid Mechanics Conference, 09. Juli 2015, Madrid, Spanien


2014


  • K. Bobzin, N. Bagcivan, T. Brögelmann, R.H. Brugnara, HPPMS-Beschichtungen metallischer Komponenten für die Kunststoffverarbeitung, 27th IKV Colloquium, Aachen, Germany (2014)
  • K. Bobzin, N. Bagcivan, R. Brugnara, M. Arghavani: Modelling and simulation of elastic-plastic behaviour of nanostructured coatings, Colloquium Materials Modelling (CMM), Stuttgart, Germany (2014)

2013


  • Nazlim Bagcivan, Kirsten Bobzin, Ricardo H. Brugnara, Cr-Al-N hard coatings - A comparison of dcMS, HPPMS and Hybrid dcMS/HPPMS Deposition Technologies, International Thin Films Conference (TACT), Taipei, Taiwan (2013)

2012


  • D. Music, J. M. Schneider, Quantum Mechanical Design of Nanolaminates and Icosahedral Borides, the 67th International Union for Vacuum Science, Technique and Applications (IUVSTA) Workshop, Daresbury, UK (2012)
  • P. Awakowicz + SFB-Team, SFB-TR 87: Gepulste Hochleistungsplasmen zur Synthese nanostrukturierter Funktionsschichten, Frühjahrstagung der Deutschen Physikalischen Gesellschaft, Stuttgart, (2012) - Hauptvortrag
  • P. Awakowicz, Plasma Diagnostics of Atmospheric Microplasmas, 24th NNV-Symposium on Plasma Physics and Radiation Technology, Lunteren, The Netherlands (2012)
  • P. Awakowicz, Plasma + Bio: Basics + Applications, Int. Conference in Plasma Medicine ICPM4, New Orleans, USA (2012)
  • A. von Keudell, Energy dissipation at the plasma surface interface, Gordon Research Conference on Plasma Processing Science, Bryant College, RI, USA (2012)
  • T. Mussenbrock, Leistungstransfer durch Niedertemperaturplasmen, Physikalisches Kolloquium, Justus-Liebig-Universität Giessen, Giessen, Germany (2012)
  • J. Emmerlich, Quantum-mechanically guided materials design of boron-based hard coatings, 39. International Conference on Metallurgical Coatings and Thin Films (ICMCTF), San Diego, USA (2012)
  • J.M. Schneider, Phase stability of TiAlNO, 39th International Conference on Metallurgical Coatings and Thin Films (ICMCTF), San Diego, USA (2012)
  • A. Hecimovic, T. de los Arcos, V. Schulz-von der Gathen, M. Böke, J. Winter, HIPIMS Discharge Dynamics: Evolution and Origin of Plasma Instabilities, 39th International Conference on Metallurgical Coatings and Thin Films (ICMCTF), San Diego, USA (2012)
  • K. Bobzin, N. Bagcivan, M. Ewering, Application Oriented Design of PVD-Coatings for Tools and Components, 39th International Conference on Metallurgical Coatings and Thin Films (ICMCTF), San Diego, USA (2012)
  • Ante Hecimovic, Teresa de los Arcos, Volker Schulz-von der Gathen, Marc Böke, Jörg Winter, Investigation of high power impulse magnetron sputtering (HIPIMS) discharge using fast ICCD camera, Spring Conference on Plasma Physics of the German Physical Society, Stuttgart, Germany (2012)

2011


  • P. Awakowicz, P. Rajasekaran, R. Pothiraja, N. Bibinov, D. Wandke, C. Suschek, J. Liebmann, V. Kolb-Bachofen, Plasmabehandlung von Zellen und Gewebe: Charakterisierung der Atmosphärendruck-Plasmen und deren Wechselwirkung mit den Zellen, Workshop Anwenderkreis Atmosphärendruckplasmen Erfurt (2011)
  • P. Awakowicz, Innenbeschichtung von langen dünnen Plastikschläuchen: Plasmadiagnostik und Filmanalytik, Workshop Vakuumbeschichtung und Plasmaoberflächentechnik V2011, Dresden (2011)
  • P. Awakowicz, K. Stapelmann, Physikalische Grundlagen und Anwendungen der Plasmasterilisation, Dentalkongress Ruhr Dentry (2011)
  • P. Awakowicz, Fundamental Processes in Plasma Technology, 38th Conference on Plasma Physics of the European Physical Society Strasbourg, France (2011)
  • K. Bobzin, N. Bagcivan, S. Theiß, Gepulste Hochleistungsplasmen zur Synthese nanostrukturierter Funktionsschichten, 15. Fachtagung für Plasmatechnologie PT15 (2011)
  • D. Music, J. M. Schneider, Quantum Design of Hard Boron-Rich Coatings, the 38th International Conference on Metallurgical Coatings and Thin Films (ICMCTF), San Diego, USA (2011)
  • T. Mussenbrock, Modellierung und Simulation von Ionenenergieverteilungsfunktionen in Prozessplasmen, 15. Fachtagung für Plasmatechnologie PT15 (2011)
  • M. Prenzel, A. Kortmann, T. Baloniak, T. Kuschel, J. Benedikt, A. von Keudell, Designing ion energy distributions to control aluminium oxide growth by RMS, Magnetron, Ion processing and Arc Technologies European Conference (MIATEC), Nancy, France (2011) - Plenary Talk


2010


  • A. von Keudell, Tim Baloniak, Marina Prenzel, Thomas Kuschel, Jan Benedikt, Designing ion energy distributions to control aluminum oxide growth by reactive magnetron sputtering, 12. International Conference on Plasma Surface Engineering (PSE), Garmisch, Germany (2010) - Plenary Talk